NANOFABRICATION ENG5174
Academic Session: 2023-24
School: School of Engineering
Credits: 10
Level: Level 5 (SCQF level 11)
Typically Offered: Semester 1
Available to Visiting Students: No
Short Description
This course* will introduce students to the principles and practice of nanofabrication. It covers lithography, pattern transfer, inspection and electrical testing; the students complete a short fabrication project during the course.
*Only register for this course if you have an immediate need for semiconductor fabrication cleanroom training - for instance for initial training of PhD students planning to work in the James Watt Nano-fabrication Centre. It will be a poor fit for students interested in semiconductor fabrication in general. The course ENG5055 Micro & Nano Technology is offered to give that more general background and will be a better fit for the majority of students.
Timetable
A four hour block comprising lecture and laboratory session once per week.
Excluded Courses
None
Co-requisites
None
Assessment
20% Written Assignment
30% Oral presentation
50% Report
Main Assessment In: December
Course Aims
The aims of this course are to:
■ guide the students through a short nanofabrication project ;
■ give the students a broad understanding of nanofabrication technologies;
■ give the students practical experience in using a range of nanofabrication technology.
Intended Learning Outcomes of Course
By the end of this course students will be able to:
■ effectively operate a range of nanofabrication tools;
■ appreciate how each tool works and the Physics and Chemistry of the processes involved;
■ design multi-step processes to fabricate simple nanoscale objects;
■ carry out multistep nanofabrication processes with an appropriate level of skill.
Minimum Requirement for Award of Credits
Students must submit at least 75% by weight of the components of the course's summative assessment.
Students must attend the timetabled laboratory classes.
Students should attend at least 75% of the timetabled classes of the course.
Note that these are minimum requirements: good students will achieve far higher participation/submission rates. Any student who misses an assessment or a significant number of classes because of illness or other good cause should report this by completing a MyCampus absence report.
More information at: https://www.gla.ac.uk/postgraduate/taught/sensorandimagingsystems/?card=course&code=ENG5174