Learning outcomes of the course unit:
Student will gain theoretical knowledge about the basic physical principles used in microsensors and microactuators, their properties and parameters. He can use modeling and simulation procedures in the design and preparation of various types of microsystems. He knows the principles and can evaluate the impact of preparation processes on the miniaturization and integration of elements into microsystems. He has knowledge of different types of microsystems used for space applications. Course Contents:
Motivation for the transition from standard conditions of preparation of microcomponents to microsystems and MEMS elements.
Design requirements, parameters and specifics of different types of microsystems.
Microsystem techniques and preparation technologies.
Wireless detection microsystems (Bluetooth, NFC, RFID, Zigbee, radar systems).
Energy collection techniques to power wireless microsystems in space.
Integrated energy collection, storage and hybrid sensors.
Functional materials for gas sensing applications and preparation methods.
Applications of gas-sensitive microsystems in the space industry
Built-in microsystems for monitoring the technical condition of space assets.
